Prof. Liangchi Zhang, Southern University of Science and Technology
Fellow of the Australian Academy of Technological Science and Engineering
Liangchi Zhang is a chair professor at the Southern University of Science and Technology (SUSTech), Director of the Shenzhen Key Laboratory of Cross-scale Manufacturing Mechanics, and Director of the SUSTech Institute for Manufacturing Innovation. In 2006, he was elected to the Australian Academy of Technological Sciences and Engineering. Prior to SUSTech, Liangchi was a Scientia Professor at the University of New South Wales. He holds a BSc and MEng from Zhejiang University, a PhD from Peking University and a Higher Doctorate, Doctor of Engineering, from the University of Sydney. Liangchi has worked at Zhejiang University in China, Cambridge University in the UK, National Laboratory of Mechanical Engineering in Japan, University of Sydney and University of New South Wales in Australia. Liangchi’s research is in the area of advanced manufacturing, emphasizing both basic research and industrial applications. His work has led to significant technological and economic impacts. Liangchi is a highly cited scholar, has been granted many awards and honors globally, and is an author of seven monographs, more than 650 SCI journal papers, and an inventor of many new technologies.
Improving the shape accuracy of optical lenses by precision glass moulding
Prof. Yu Sun, University of Toronto
Fellow of the Canadian Academy of Engineering
Foreign Academician of the Chinese Academy of Engineering
Sun obtained his Ph.D. from the University of Minnesota in 2003 and did his postdoctoral research at ETH-Zürich. He joined the University of Toronto in 2004. In 2012-2013, he directed the University Nanofabrication Center as the faculty director. Sun has served and serves on the editorial boards of IEEE Trans. Robotics, IEEE Trans. Automation Science and Engineering, IEEE Trans. Mechatronics, J. Micromechanics Microengineering, Sensors and Actuators A: Physical, Scientific Reports, and Microsystems & Nanoengineering. Among the awards he received were the McLean Award in 2009; the IEEE Robotics and Automation Society Early Academic Career Award in 2010; eight times University of Toronto Connaught Innovation Award; two times First Prize for technical achievement of ASRM (American Society for Reproductive Medicine); an NSERC E.W.R. Steacie Memorial Fellowship in 2013; the IEEE C.C. Gotlieb Computer Award in 2018; the CSME Mechatronics Medal in 2020; an NSERC Synergy Award for Innovation in 2021; and over a dozen best paper awards and finalists in journals and at international conferences.
Prof. Minghui Hong, Xiamen University
Fellow of the Singapore Academy of Engineering
He received his PhD degree from the National University of Singapore in 2000, and has served successively as a professor, doctoral supervisor, director of the Center for Frontier Research and Technology Innovation, and director of the Center for Optical Science and Engineering at the National University of Singapore. He is a fellow of the Singapore Academy of Engineering, a Fellow of the Optical Society of America, a Fellow of the International Society of Optical Engineering, a Fellow of the International Society of Photonics and Laser Engineering, and a Fellow of the Institution of Engineers Singapore. He is a well-known scholar and leader in the field of laser optics. In 2021, he was appointed as one of the first "Nan Qiang Investment Advisors".
His main research interest is laser micro-nano processing and detection technology. He has carried out international leading research work in the fields of laser micro-manufacturing, laser cleaning, laser welding and optical detection. He has published more than 500 papers and co-authored 15 academic monographs in international first-class academic journals, including Nature, Nature Nanotechnology, Science Advances, Nature Communications, etc. He has 42 patents from China, Singapore, the United States and Germany. Executive editor of Opto-Electronic Advances, Opto-Electronic Science and Optoelectronic Engineering, associate editor of Journal of Central South University (English Edition), consultant of Ultrafast Science, Editorial member of Nature sub-journal "Light: Science & Applications", journal of Chinese Academy of Engineering "Engineering", "Chinese Science: Physics, Mechanics and Astronomy", "Physics" and "Laser Micro/nanoengineering".
Prof. Shulian Zhang, Tsinghua University
Wei Gao, Tohoku University
Fellow of Engineering Academy of Japan
Wei Gao received his Bachelor from Shanghai Jiao Tong University in 1986, followed by MSc and Ph. D from Tohoku University in 1991 and 1994, respectively. He is currently a professor in Tohoku University. His research interests lie primarily in precision nanometrology. He is an author of the books “Precision Nanometrology” (Springer), “Surface Metrology for Micro- and Nanofabrication” (Elsevier), “Optical Metrology for Precision Engineering” (De Gruyter). He was awarded the Prize for Science and Technology from the Ministry of Education, Culture, Sports, Science and Technology (MEXT), Japan, in 2019. He is a fellow of CIRP, ISNM, JSPE and a Fellow of The Engineering Academy of Japan (EAJ).
Advances in optical dimensional metrology for precision engineering
Precision engineering is a discipline to develop and apply principles of design, manufacture, control and measurement for precision machines and precision manufacturing. Precision dimensional metrology is one of the cornerstones to support precision engineering. Among the various types of measurement methods, optical methods with noncontact, fast, and sensitive features are playing an increasingly important role in precision dimensional metrology where accurate measurements are required to be made in a short time and with minimal influence on the measurement target, i.e., machines and parts. In the first part of this speech, advances in commercially available measuring instruments of optical dimensional metrology, such as laser interferometer, optical encoders, autocollimators, optical microscopes are presented. In the second half, state-of-the-art research activities on optical dimensional metrology, such as multi-axis optical encoders/ autocollimators, as well as the next-generation optical metrology systems based on ultrashort pulse laser and optical frequency comb will then be demonstrated.
Prof. Yossi Rosenwaks, Tel-Aviv University
Chair Professor Nanoelectronics, former Dean of Engineering. Yossi is a Professor of Electrical Engineering at TAU since 2005 after joining the faculty in 1996, and currently a member of Israel higher council of education (CHE), and managing director of Fraunhofer Innovation Platform (FIP) for sensors. Prof. Rosenwaks current research interests include nanowire transistors and sensors, two-dimensional materials and devices, and charge carrier dynamics and transport in semiconductors. Prof. Rosenwaks is a co-author of more than 200 peer reviewed articles, 10 international patents, has presented 75 invited talks at international meetings, and has supervised more than 70 PhD and MSc students, 8 of which are currently faculty at top research universities. He served as the president of the Israel Vacuum Society (2003-2006), and as the director of TAU’s Wolfson Center for Applied Materials Research and Gordon Center for Energy Studies (2005-2008), and the head of the Physical Electronics department (2011-14), and the Dean of the Faculty of Engineering (2014-2022).
Prof. Ken-ya Hashimoto, University of Electronic Science and Technology of China
He joined Chiba University, Chiba, Japan, as a Research Associate in 1980 and retired there as a Professor Emeritus in 2021. Right after retirement, he moved to the University of Electronic Science and Technology of China, Chengdu, China, as a Professor. He received the Dr. Eng. degree from the Tokyo Institute of Technology, Tokyo, Japan, in 1989.
He received IEEE Fellow (2005), International Distinguished Lecturer Award (2005) and Distinguished Service Award (2019) both from the IEEE UFFC Society, Ichimura Industrial Award from the New Technology Development Foundation (2015), and The Commendation for Science and Technology by the Minister of Education, Culture, Sports, Science and Technology for Research (2018).
His current research interests include simulation and design of various high-performance surface and bulk acoustic wave devices.
Optical Diagnosis of RF SAW/BAW Devices in Multi-GHz Range
Optical sensing of acoustic vibrationis well recognized as a versatile diagnosis tool for surface and bulk acoustic wave (SAW/BAW) devices, which are widely used in the radio frequency (RF) front-end of smart phones. Information captured by optical sensing may offer betterunderstanding of their operation state, which often results in further enhancement of device performances.
The author and his coworkers started to develop a fast-mechanical scanning and phase-sensitive laser probe system for RF SAW/BAW devices in 2003.The system has been evolved sustainably for more than 20 years to fulfill requests given by these outside users.Various unique functions were developed and their implementation made the system more useful and easier to use also for users.
This paper details the optical probing system developed by the author’s group. In addition to the optical setup, employed detection electronics, mechanical scan scheme and various supporting techniques are detailed. Some measured data are given and their use for the device diagnosis is demonstrated.
Prof. Zhouling Wu，ZC Optoelectronic Technologies. LTD.
Prof. Gaoliang Dai, Physikalisch -Technische Bundesanstalt
Dr. Gaoliang Dai is currently a research scientist and head of the working group “3D nanometrology” at the Physikalisch-Technische Bundesanstalt (PTB) – the national metrology institute of Germany. Gaoliang gained a BSc and a PhD in optical engineering from the Tsinghua University, P. R. China, in the year of 1994 and 1998, respectively. He was a R&D engineer in the Physik Instrument (PI) GmbH & Co till the year 2001 before he joined the PTB. His research interests including the dimensional nanometrology, nanopositioning, interferometry, AFM and TEM techniques. He has received research fundings from EMPIR, ECSEL JU, ENIAC JU, TransMeT and industry in over ten projects. He has authored more than 100 papers in peer reviewed highly ranked journals, as well as offered a number of keynote and invited presentations in international conferences. Gaoliang serves as an editorial board member for the journals Nanomanufacturing and Metrology, Metrology and Measurement Technology. He is a council member of the International Committee on Measurements and Instrumentation (ICMI), and a member of the Metrology Focus Team of the IEEE-International Roadmap for Devices and Systems (IRDS). In addition, he is also a university guest professor, teaching lecture as well as supervising master and PhD students.
Accurate and traceable nanoscale dimensional metrology
Nanometrology covers a wide range of metrology techniques for enabling characterisation and measurement of nanomaterials, structures, components, devices, and systems at the nanoscale. Adequate nanometrology is key to innovations in nanotechnology and nanoscience, such as understanding the interaction mechanism between atoms, controlling nanomanufacturing processes, optimising nanoscale products as well as preventing nanotoxicity. Nanometrology is closely related to industry sectors such as semiconductor, automotive, nanomaterial and nanophotonics, and has major economic, environmental, and social impacts on our economy and daily lives.
This keynote paper will offer an overview of recent advancements for accurate and traceable nanoscale dimensional metrology, particularly using the atomic force microscopic (AFM) techniques. Two kinds of fundamental calibration tasks of nanometrology: (i) calibration of geometrical parameters (i.e. magnification, nonlinearity, orthogonality, etc.) and (ii) calibration of beam/tip geometry, will be focused.
To address above mentioned metrology challenges, some developments at the Physikalisch-Technische Bundesanstalt, the national metrology institute of Germany, will be introduced. One is the development of a unique high-speed large-range metrological AFM (HS LR-AFM), which has a capable measurement volume of 25 mm x 25 mm x 5 (x, y, z) and a measurement speed up to 1 mm/s. The HS LR-AFM is currently one of the key workhorses for satisfying versatile nanoscale calibration tasks with e.g. an expanded measurement uncertainty of 0.3 nm (k=2) for step height calibrations, and <10 pm (k=2) for mean pitch calibration of lateral standards. The other concerns the development of a new bottom-up traceability approach for true 3D nanometrology, where the three-dimensional geometries of complex nanostructures are ultimately calibrated to the lattice constant of crystal silicon. Excellent results have been achieved using this new traceability approach as well. For instance, together with a set of well-developed data evaluation algorithms and software, the AFM tip geometry can be calibrated with a measurement repeatability down to approx. 0.3 nm and an uncertainty down to approx. 1 nm. The critical dimension of line width standard can be calibrated with an expanded measurement uncertainty of 2.5 nm (k=2) or even below, as confirmed by international comparisons.
Some selected application examples of the developed nanometrology techniques will be presented: (i) development of an extreme ultraviolet (EUV) photomask standard; (ii) calibration of various nanoscale standards; and (iii) development of a novel material measure for characterising 2D Instrument Transfer Function (ITF) of various optical areal surface topography measurement tools.