Femtosecond laser microfabrication towards high efficiency, new materials and advanced devices
Dong Wu, University of Science and Technology of China
Abstract: Femtosecond laser microfabrication has been proved to be a powerful 3D microfabrication technique with high precision. However, the main difficulties are low fabrication efficiency caused by point-to-point scanning strategy, complex interaction mechanism between laser and new materials, and how to combine with other microfabrication method for highly functional devices. In order to overcome these disadvantages, (1) SLM-based (spatial light modulator) 2D-3D laser intensity patterns (e.g., mutlifoci or arbitrary patterns) were proposed to significantly speed up the fabrication process by several orders of magnitude; (2) The complex physical mechanism between laser and new materials was investigated for highly functional microstructures fabrication; (3) The laser fabrication was combined with other bottom-up or top-down method for more advanced devices. These works have found a wide range of applications in optics, microbotics, and biology, such as nonlinear beam shaping, particles filtering, and cell manipulation.
Dong Wu is a professor of engineering science at University of Science and Technology of China. He obtained the fifth Chinese Thousand Youth Talents Plan and One hundred excellent doctoral theses. His current research interests are SLM-based high-efficiency femtosecond laser 3D microfabrication in various materials. Prof. Wu has published 100 papers in the international journals of Nature Photonics, Nat. Comm., Light: Sci & Appl.(Nature publishing group), PNAS, Adv. Mater., ACS Nano and so on (30 papers IF>10.0). These works were supported by NSFC, CAS, and MOST.